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WF5837C圧力センサー

温度補償型微小圧力センサー ― 高精度と安定性を実現

This piece looks at a temperature-self-compensating MEMS micro-pressure sensor based on an island-beam-membrane coupled design, and explains how the structure actively cancels output drift caused by thermal stress. Made with SOI and dual-DRIE precision processing, the device shows very low temperature drift across 0°C–50°C (zero-point drift 0.081%FS, full-range drift 0.090%FS, nonlinearity 0.307%FS), offering a high-accuracy, low-power micro-pressure detection option.

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