[МЕМС-пристрої] Аналіз принципу роботи напівпровідникових газових датчиків
Semiconductor gas sensors are MEMS devices: metal-oxide layers change conductivity when gas reacts at elevated temps, read by resistor or FET circuits. Design hinges on material choice, micro-heater control, packaging and signal conditioning to balance sensitivity, selectivity and stability for real-world monitoring.















