Fortschritte bei Hochleistungs-MEMS-Drucksensoren: Design, Herstellung, und Verpackung
Mikroelektromechanische Systeme (MEMS) Drucksensoren werden in einer Vielzahl von Branchen häufig eingesetzt, einschließlich Automobil, Luft- und Raumfahrt und medizinisch, and have become important devices for modern engineering by virtue of their high accuracy and small size. In den letzten Jahren, pressure sensors have made significant advances in design, manufacturing and packaging technologies, and their performance has been significantly improved. In diesem Papier, we will discuss the latest trends in micro differential pressure sensors (MDPS), resonant pressure sensors (RPS), integrated sensing chips, and miniaturized pressure sensors.