Advances in high-performance MEMS pressure sensors: design, fabrication, and packaging
Microelectromechanical systems (MEMS) pressure sensors are widely used in a variety of industries, including automotive, aerospace and medical, and have become important devices for modern engineering by virtue of their high accuracy and small size. In recent years, pressure sensors have made significant advances in design, manufacturing and packaging technologies, and their performance has been significantly improved. I det här dokumentet, we will discuss the latest trends in micro differential pressure sensors (MDPS), resonant pressure sensors (RPS), integrated sensing chips, and miniaturized pressure sensors.