Висока тачност МЕМС Негативни сензори притиска за прецизну хватање података
High-precision MEMS negative pressure sensors convert tiny diaphragm movements into electrical signals using capacitive or strain-gauge methods. With resolutions as low as 10 Pa and nonlinearity under 0.01% FS, they ensure stable, high-speed performance across a 0–50 kPa range. This article covers their structure, performance, installation, testing, and real-world use, offering engineers a reliable solution for accurate negative-pressure data capture.
















